Suitable for engineers, technicians, and plant personnel in the semiconductor and related industries, this book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization.[...]
Traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the years. This book covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics.[...]